Record Details

Title:
Absolute flatness measurement using oblique incidence setup and an iterative algorithm period. A demonstration on synthetic data
Topic:
Abstract:
A method to provide absolute planarity measurements through an interferometric oblique incidence setup and an iterative algorithm is presented. With only three measurements, the calibration of absolute planarity is achieved in a fast and effective manner. Demonstration with synthetic data is provided, and the possible application to very long flat mirrors is pointed out.
Imprint:
Washington, DC, Soc., 2014
Journal Information:
Opt. Express, 22, 3, 3538 (2014)
External related publications:
10.1364/OE.22.003538
WOS:000332518100136 (WOS)
Language(s):
English


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 Record created 2016-10-11, last modified 2017-09-12

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